Metrology and analysis

When ArF resist patterns are measured with a CD-SEM, what is the phenomenon called in which electron-beam irradiation makes the patterns shrink?

  1. AShrinkage (resist shrinkage due to the electron beam)
  2. BCharge-up
  3. CDrift
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Answer: A. Shrinkage (resist shrinkage due to the electron beam)

ArF resist is sensitive to electron beams, and the irradiation used for measurement can break down molecules, reducing volume and shrinking the pattern. This causes measurement error, so measurements are made with measures such as reducing the electron dose.

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