What is Wet oxidation?

Thermal oxidation in an atmosphere containing water vapor. It grows faster than dry oxidation and is used to make thick oxides.

Wet oxidation in the explanations

Wet oxidation uses steam; H2O dissolves in SiO2 several hundred times more than O2, so it grows oxide several to ten times faster than dry oxidation—at 1000 °C for an hour, roughly 70 nm dry versus 400 nm wet.
Which correctly compares dry oxidation (O2) and wet oxidati…
One hour of wet oxidation grows about 200 nm at 900 °C but about 700 nm at 1100 °C.
If the thermal oxidation temperature is raised, how does th…
Wet oxidation uses steam, Si + 2H2O → SiO2 + 2H2, and some of the hydrogen produced remains in the film, making wet oxide slightly less dense.
Which chemical reaction occurs in the dry thermal oxidation…