Oxidation and diffusion

If the thermal oxidation temperature is raised, how does the oxide thickness obtained in the same time change?

  1. AIt becomes thicker
  2. BIt becomes thinner
  3. CIt does not change
Show answer and explanation

Answer: A. It becomes thicker

Both the interface reaction rate and the diffusion of oxidant through the oxide increase with temperature, so raising the temperature gives thicker oxide in the same time. High-temperature wet oxidation is used when thick films are needed quickly.

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More Oxidation and diffusion questions

  1. In LOCOS (local oxidation), what is the phenomenon called in which oxide encroaches like a bird's beak under the edge of the nitride mask?
  2. What is an advantage of performing thermal oxidation in a high-pressure oxidizing atmosphere?
  3. Which is a characteristic of radical oxidation, which uses oxygen radicals?
  4. According to the Deal-Grove model, where does thermal oxidation take place?
  5. Which chemical reaction occurs in the dry thermal oxidation of silicon?