What is FZ method (float zone)?

A method that melts a zone of a polysilicon rod and moves that molten zone along to form a single crystal. With no crucible, oxygen content is low, suiting high-resistivity wafers.

Field: Silicon wafers

Related terms

Crystal orientation Czochralski (CZ) method DZ (denuded zone) Gettering Ingot MCZ method (magnetic-field-applied CZ) Monitor wafer Necking Notch Oxygen precipitates (BMD)

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