What is Segregation coefficient?

The ratio of impurity concentration in the crystal to that in the melt during solidification. For most impurities it is below 1, so they concentrate in the melt and the later part of a CZ crystal has higher impurity levels.

Field: Silicon wafers

Segregation coefficient in the explanations

Questions that mention Segregation coefficient (3)

  1. Which impurity is typically added to the melt to make p-type silicon crystals by the CZ method?
  2. When a doped crystal is pulled by the CZ method, the dopant concentration tends to be higher toward the bottom of the crystal (later in the pull). Why?
  3. When boron-doped silicon is thermally oxidized, how does the boron concentration on the silicon side near the interface tend to change?

Related terms

Czochralski (CZ) method Ingot Threshold voltage Crystal orientation DZ (denuded zone) FZ method (float zone) Gettering MCZ method (magnetic-field-applied CZ) Monitor wafer Necking

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