Silicon wafers
Which is a characteristic of single-crystal silicon made by the FZ (floating zone) method?
- AIt is the easiest to scale to large diameters and is the mainstream method for 300 mm wafers
- BBecause no quartz crucible is used, it contains little oxygen and other impurities, making high-resistivity crystals easy to obtain
- CIt turns polycrystalline silicon into a single crystal without melting it
Show answer and explanation
Answer: B. Because no quartz crucible is used, it contains little oxygen and other impurities, making high-resistivity crystals easy to obtain
In the FZ method, a band of a polysilicon rod is melted by RF heating, and the molten zone is moved to convert the rod into a single crystal. Without a crucible, little oxygen is incorporated, giving high-purity, high-resistivity crystals used for power devices and similar applications. Large diameters are easier with the CZ method.