Packaging and assembly
What is the step called that grinds the back side of a wafer before dicing to thin it and make the package thinner?
- ABack grinding
- BCMP
- CEtch-back
Show answer and explanation
Answer: A. Back grinding
In back grinding, the front of the wafer is protected with tape while the back is ground with a grinding wheel to the specified thickness. For memory packages with stacked chips, wafers may be thinned to a few tens of µm. The damaged layer from grinding is removed by polishing or etching.