Metrology and analysis

What is the main purpose of performing metrology and inspection partway through the process on a production line?

  1. ATo deliberately slow down the process
  2. BTo catch process abnormalities early and stop them, preventing large volumes of defective product
  3. CTo increase product weight
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Answer: B. To catch process abnormalities early and stop them, preventing large volumes of defective product

LSI manufacturing takes months, so discovering a problem only at the end would leave large volumes of defective product. Measuring and inspecting mid-process catches abnormalities early, so the responsible tool or step can be stopped and corrected, limiting losses.

  • A. Slowing the process is not the purpose.
  • B. Correct. It catches abnormalities early to limit losses.
  • C. It is not to increase weight.
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More Metrology and analysis questions

  1. In production-line metrology, why are only selected wafers or points often measured rather than all of them?
  2. Which correctly describes observing a cross-section in detail after breaking or milling the wafer?
  3. Which pair correctly names a measuring instrument's property of "small spread when measuring the same thing repeatedly" and that of "measured values being close to the true value"?
  4. Which spectroscopic method is often used to evaluate stress (strain) in silicon locally and non-destructively?
  5. Which method is used to observe solder joint voids and wire shapes inside a package in three dimensions without destroying it?