Metrology and analysis

Which correctly describes the general difference between "metrology" and "inspection" on a semiconductor production line?

  1. AMetrology measures values such as dimensions and film thickness, while inspection searches for abnormalities such as particles and pattern defects
  2. BMetrology and inspection mean exactly the same thing
  3. CMetrology is done only by eye and inspection only by tools
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Answer: A. Metrology measures values such as dimensions and film thickness, while inspection searches for abnormalities such as particles and pattern defects

Production lines distinguish metrology, which quantitatively measures values such as line width, film thickness and overlay, from inspection, which finds abnormalities such as particles and missing or bridged patterns over wide areas. Both are done to learn the process state early and reduce defects.

  • A. Correct. Metrology measures values; inspection searches for abnormalities.
  • B. Their purposes and tools differ.
  • C. Both are mainly done with dedicated tools.
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More Metrology and analysis questions

  1. What is the main purpose of performing metrology and inspection partway through the process on a production line?
  2. In production-line metrology, why are only selected wafers or points often measured rather than all of them?
  3. Which correctly describes observing a cross-section in detail after breaking or milling the wafer?
  4. Which pair correctly names a measuring instrument's property of "small spread when measuring the same thing repeatedly" and that of "measured values being close to the true value"?
  5. Which spectroscopic method is often used to evaluate stress (strain) in silicon locally and non-destructively?