Metrology and analysis

Which inspection detects defects such as contact open failures using differences in brightness caused by differences in charging under an electron beam?

  1. AX-ray diffraction (XRD)
  2. BVoltage contrast inspection
  3. CX-ray reflectometry (XRR)
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Answer: B. Voltage contrast inspection

Under an electron beam, contacts electrically connected to the substrate and elsewhere let charge escape and appear bright (or dark), while floating contacts that are disconnected charge up and appear with a different brightness. This difference reveals open failures that cannot be seen from appearance.

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