Metrology and analysis

What is the measurement called that monitors a process by measuring product wafers partway through processing on the production line?

  1. AInline metrology
  2. BOffline metrology
  3. CDestructive analysis
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Answer: A. Inline metrology

Inline metrology uses measurement tools built into the production line to measure film thickness, dimensions, overlay, defects and more on product wafers during processing. It finds abnormalities early and keeps defective products from flowing to later steps. Nondestructive methods that do not damage the product are used.

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