Interconnect processes
What is the time-dependent dielectric breakdown of the insulator between wires called, which is becoming more important as wire spacing shrinks?
- ABEOL TDDB (inter-wire TDDB)
- BNBTI
- CHCI
Show answer and explanation
Answer: A. BEOL TDDB (inter-wire TDDB)
As wire spacing narrows, the electric field across the insulator between wires increases, and long-term use can cause dielectric breakdown. Low-k films in particular tend to have lower dielectric strength than conventional oxide, so BEOL TDDB has become an important item in evaluating wiring reliability.