Interconnect processes
What is the basic role of the interlayer dielectric that fills the space between wires?
- ATo lower wire resistance
- BTo set the transistor threshold voltage
- CTo electrically insulate wires from each other and prevent shorts
Show answer and explanation
Answer: C. To electrically insulate wires from each other and prevent shorts
The interlayer dielectric electrically insulates adjacent wires in the same layer and wires in upper and lower layers, preventing shorts. Because it also affects capacitance between wires, low-permittivity (low-k) materials have come into use.
- A. The insulator does not lower wire resistance.
- B. The threshold voltage is set by the transistor's gate structure and similar.
- C. Correct. It insulates wires from each other.