DRAM
What is the main purpose of burying the gate electrode in a trench in the silicon substrate (buried word line) in recent DRAM cell transistors?
- ATo make the cell emit light
- BTo lengthen the effective channel and suppress leakage while shrinking the cell
- CTo eliminate the need for a capacitor
Show answer and explanation
Answer: B. To lengthen the effective channel and suppress leakage while shrinking the cell
DRAM cell transistors need extremely low leakage so that the capacitor charge does not escape. Burying the gate in a trench allows a longer effective channel along the trench even with small planar dimensions, suppressing leakage due to short-channel effects.