Deposition (CVD and PVD)
What is the approximate film thickness deposited in one ALD cycle?
- AAbout 1 µm
- BAbout 0.1 nm (about one atomic layer or less)
- CAbout 100 nm
Show answer and explanation
Answer: B. About 0.1 nm (about one atomic layer or less)
One ALD cycle deposits about one atomic layer or less, roughly 0.1 nm. Even a film of a few nm therefore needs dozens of cycles, making deposition slow. In return, thickness can be controlled precisely by the number of cycles.