Advanced packaging (3D and chiplets)
When a TSV wafer is thinned to tens of micrometers and processed, which technique temporarily attaches it to a support wafer (carrier) to prevent cracking and warpage?
- AWire bonding
- BTemporary bonding and debonding
- CReflow
Show answer and explanation
Answer: B. Temporary bonding and debonding
A wafer thinned to tens of micrometers cracks easily on its own and warps significantly. It is therefore temporarily attached to a glass or silicon support wafer with adhesive or the like (temporary bonding), backside grinding and wiring are carried out, and it is then released by laser, heat or other means (debonding). It is an important technique for handling thin wafers safely.
- A. Wire bonding connects a chip to terminals with fine metal wires.
- B. Correct. The wafer is handled while temporarily attached to a support wafer.
- C. Reflow is the step of melting solder to make joints.