Cleanrooms and equipment

Which cleanroom style places tools in a large room with few partitions, ensuring wafer cleanliness with sealed carriers such as FOUPs and mini-environments?

  1. ABay-and-chase style
  2. BTunnel style
  3. CBallroom style
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Answer: C. Ballroom style

In the ballroom style, tools are lined up in a large space that is not finely partitioned by walls. Because wafers are protected by sealed carriers and tool mini-environments, the whole room need not be kept as clean, and tools are easier to rearrange. It is widely adopted in 300 mm fabs.

  • A. The bay-and-chase style separates work areas from maintenance areas with walls.
  • B. The tunnel style is an older approach that places tools along a clean, tunnel-like zone.
  • C. Correct. Tools are lined up in a large space.
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