Cleanrooms and equipment

Which correctly describes a FOUP?

  1. AThe light source of an exposure tool
  2. BA machine that polishes wafers
  3. CA container that transports and stores 300 mm wafers sealed inside
Show answer and explanation

Answer: C. A container that transports and stores 300 mm wafers sealed inside

A FOUP (Front Opening Unified Pod) is a front-opening container for transporting and storing 300 mm wafers sealed inside. By keeping wafers clean only inside the FOUP and inside equipment, contamination is prevented without making the whole fab ultra-clean. FOUPs are moved automatically by overhead transport and similar systems.

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More Cleanrooms and equipment questions

  1. What is the main purpose of the downflow method, in which air flows in one direction from ceiling to floor in a cleanroom?
  2. Which high-performance filters are used to remove fine particles from cleanroom air?
  3. What is the approach called that keeps only the small space around wafers at high cleanliness?
  4. What is the main reason the air pressure inside a cleanroom is kept higher than its surroundings (positive pressure)?
  5. Which is a major source of particles in cleanrooms, addressed by wearing cleanroom suits?