Silicon wafers

What is a wafer called that is run through a process separately from products to check equipment condition or measure film thickness?

  1. ASOI wafer
  2. BEpitaxial wafer
  3. CMonitor wafer (test wafer)
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Answer: C. Monitor wafer (test wafer)

Monitor wafers are run separately from products to check film thickness, particle counts, etch rates and more. They are used to check periodically that equipment is working properly. After use, their surfaces may be repolished so they can be reused.

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More Silicon wafers questions

  1. What is the main reason silicon wafers must be very flat?
  2. Which equipment is commonly used to slice a silicon ingot into many wafers at once?
  3. What is the main purpose of chamfering (beveling) the edge of a wafer?
  4. Which impurity is typically added to the melt to make p-type silicon crystals by the CZ method?
  5. When a doped crystal is pulled by the CZ method, the dopant concentration tends to be higher toward the bottom of the crystal (later in the pull). Why?