Silicon wafers
In the CZ method, what is the main purpose of controlling the ratio of pull rate to temperature gradient in the crystal (V/G)?
- ATo control the type and amount of point defects (vacancies and interstitial silicon) incorporated, reducing crystal defects
- BTo change the color of the crystal
- CTo extend the life of the crucible
Show answer and explanation
Answer: A. To control the type and amount of point defects (vacancies and interstitial silicon) incorporated, reducing crystal defects
The ratio of pull rate V to temperature gradient G determines whether the excess point defects incorporated into the crystal are vacancies or interstitial silicon. Controlling V/G properly yields high-quality crystals with few microdefects (such as COPs) formed when these point defects cluster.