Silicon wafers

Which is the typical method for producing high-purity polycrystalline silicon?

  1. ABosch process
  2. BSiemens process (deposition by hydrogen reduction of trichlorosilane)
  3. CDamascene process
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Answer: B. Siemens process (deposition by hydrogen reduction of trichlorosilane)

In the Siemens process, metallurgical silicon is reacted with hydrogen chloride to make trichlorosilane, which is purified by distillation and then reacted with hydrogen on heated silicon rods to deposit high-purity silicon. The polysilicon made this way is the raw material for the CZ method and others.

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More Silicon wafers questions

  1. What is a wafer called that is run through a process separately from products to check equipment condition or measure film thickness?
  2. What is the main reason silicon wafers must be very flat?
  3. Which equipment is commonly used to slice a silicon ingot into many wafers at once?
  4. What is the main purpose of chamfering (beveling) the edge of a wafer?
  5. Which impurity is typically added to the melt to make p-type silicon crystals by the CZ method?