Process materials (gases and chemicals)

What is the main reason organic alkalis such as TMAH, rather than sodium hydroxide, are used as semiconductor developers?

  1. ABecause TMAH has a stronger color
  2. BBecause TMAH is always cheaper
  3. CTo avoid contamination by metal ions such as sodium
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Answer: C. To avoid contamination by metal ions such as sodium

Alkali metal ions such as sodium and potassium harm devices, for example by moving in oxides and shifting transistor threshold voltages. TMAH is an organic alkali containing no metal, so there is no risk of metal contamination, and it is used as the semiconductor developer.

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