Process materials (gases and chemicals)

Which high-purity, heat-resistant material is widely used for the process tubes of furnaces and the fixtures that hold wafers?

  1. APolyethylene
  2. BQuartz glass
  3. CCopper
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Answer: B. Quartz glass

Quartz glass is high-purity, heat-resistant, has low thermal expansion and resists many chemicals, so it is used for furnace tubes, wafer boats, CZ crucibles and more. SiC is also used for parts that need strength at even higher temperatures.

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