Process materials (gases and chemicals)
Which combination of gases is used to make an ArF excimer laser oscillate?
- AOxygen and nitrogen
- BOnly hydrogen and helium
- CArgon and fluorine (with a buffer gas such as neon)
Show answer and explanation
Answer: C. Argon and fluorine (with a buffer gas such as neon)
An ArF excimer laser excites a gas mixture containing argon and fluorine with an electrical discharge, emitting light at 193 nm. Most of the gas is a buffer gas such as neon. A KrF excimer laser (248 nm) uses krypton and fluorine.