Lithography
What is the role of lithography in semiconductor manufacturing?
- ATransferring circuit patterns onto resist on the wafer using light or similar
- BImplanting impurities into the wafer
- CGrinding wafers thin
Show answer and explanation
Answer: A. Transferring circuit patterns onto resist on the wafer using light or similar
Lithography transfers the circuit pattern drawn on a mask onto resist coated on the wafer, using light (exposure). The transferred resist pattern then serves as a mask for etching or ion implantation.
- A. Correct. It transfers patterns onto resist.
- B. Implanting impurities is ion implantation.
- C. Thinning wafers is done by grinding or CMP.