Lithography

Which company is effectively the sole supplier of EUV lithography tools?

  1. AIntel (United States)
  2. BASML (Netherlands)
  3. CTSMC (Taiwan)
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Answer: B. ASML (Netherlands)

EUV lithography tools are developed and supplied by effectively a single company, ASML of the Netherlands. They combine advanced technologies such as the light source, reflective optics and stages, and each costs on the order of hundreds of millions of dollars. TSMC and Intel are chipmakers that buy and use the tools.

  • A. Intel is a chipmaker that uses EUV tools.
  • B. Correct. ASML is effectively the only supplier.
  • C. TSMC is a foundry that uses EUV tools.
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More Lithography questions

  1. What is the wavelength of the light used in KrF excimer laser lithography?
  2. What is the main purpose of treating the wafer surface with HMDS or similar before coating resist?
  3. What does "half-pitch", used as a measure of scaling, mean?
  4. What are the reference marks placed on a wafer so that each exposure can be accurately overlaid on patterns made in earlier steps called?
  5. What does "CDU", controlled in lithography, mean?