Lithography

What was the original meaning of the word "lithography"?

  1. AA technique for counting electrons
  2. BA printing technique using stone plates
  3. CA technique for bending light
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Answer: B. A printing technique using stone plates

Lithography comes from the Greek lithos (stone) and graphein (to write) and originally meant a printing technique using stone plates. Because the idea of transferring a master pattern onto something else is shared, the name is also used for the pattern-transfer technology in semiconductors.

  • A. It does not mean counting electrons.
  • B. Correct. It derives from printing with stone plates.
  • C. It does not mean bending light.
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  3. What is the wavelength of the light used in KrF excimer laser lithography?
  4. What is the main purpose of treating the wafer surface with HMDS or similar before coating resist?
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