Lithography

Which patterning technique uses the tendency of block copolymers to form regular fine patterns spontaneously?

  1. AOPC
  2. BDirected self-assembly (DSA)
  3. CAtomic layer etching
Show answer and explanation

Answer: B. Directed self-assembly (DSA)

A block copolymer joins two polymers with different properties, which try to separate and form regular stripes or dots several nm to tens of nm in size. DSA controls their arrangement with guide patterns and is being studied as a way to make patterns finer than the lithographic resolution limit.

Practice this topic Back to topic

More Lithography questions

  1. What is the role of lithography in semiconductor manufacturing?
  2. What was the original meaning of the word "lithography"?
  3. Which correctly describes photoresist?
  4. Which company is effectively the sole supplier of EUV lithography tools?
  5. What is the wavelength of the light used in KrF excimer laser lithography?