Lithography

Which equipment is mainly used to write the patterns of photomasks (reticles)?

  1. AElectron-beam writers
  2. BSteppers
  3. CCMP tools
Show answer and explanation

Answer: A. Electron-beam writers

Photomask patterns are made with electron-beam writers and similar tools that write directly on resist with a finely focused electron beam. Because they write without a mask, they can draw very fine patterns, but writing takes a long time, so production uses masks to transfer patterns all at once by exposure.

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  1. What is the role of the thin membrane (pellicle) stretched over a photomask at a fixed distance?
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