Interconnect processes

For wiring with a resistivity of 2 µΩ·cm, 1 mm long, with width and thickness of 100 nm each, approximately what is the resistance?

  1. AAbout 2 Ω
  2. BAbout 2 kΩ
  3. CAbout 2 MΩ
Show answer and explanation

Answer: B. About 2 kΩ

Resistance is R = ρL / (W × T). With ρ = 2×10⁻⁸ Ω·m, L = 1×10⁻³ m and W × T = (1×10⁻⁷)² = 1×10⁻¹⁴ m², R = 2×10⁻⁸ × 1×10⁻³ ÷ 1×10⁻¹⁴ = 2000 Ω, about 2 kΩ. This shows that narrow wires have large resistance even when short.

Practice this topic Back to topic

More Interconnect processes questions

  1. Where are voids due to electromigration likely to form?
  2. In highly scaled LSIs, how has wiring delay trended compared with gate delay?
  3. What problem must be watched for when etching or ashing low-k films?
  4. What is the time-dependent dielectric breakdown of the insulator between wires called, which is becoming more important as wire spacing shrinks?
  5. What is the main role of the wiring inside an LSI?