Testing and inspection
What is the inspection called that measures TEG parameters such as threshold voltage and sheet resistance on wafers that have completed front-end processing, to confirm the process met specifications?
- AWAT (wafer acceptance test) / parametric test
- BFinal test
- CBurn-in
Show answer and explanation
Answer: A. WAT (wafer acceptance test) / parametric test
WAT measures the electrical parameters of TEGs (threshold voltage, on-current, sheet resistance, contact resistance and so on) after front-end processing is complete. Wafers out of specification do not proceed, and the data are also used to monitor and improve the process. Its purpose differs from tests of chip functionality.
- A. Correct. It checks process results through parameters.
- B. Final test judges finished products after packaging.
- C. Burn-in is a stress test to remove early failures.