Process materials (gases and chemicals)

What is the main hazard in handling silane (SiH4), used as a source for CVD and other processes?

  1. AIt is pyrophoric and may ignite if it leaks into air
  2. BIt is nonflammable and nontoxic, so no special control is needed
  3. CIt emits strong radiation
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Answer: A. It is pyrophoric and may ignite if it leaks into air

Silane is a pyrophoric gas that can ignite spontaneously on contact with air. It is therefore kept in exhausted gas cabinets and used with safety measures such as leak detection in piping and emergency shut-off.

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