MEMS and sensors
Which correctly describes how MEMS sensors are combined with their signal-processing circuits?
- AThey cannot be combined
- BThey must always be integrated on the same chip
- CThey can be integrated on the same chip, or made as separate chips housed in one package
Show answer and explanation
Answer: C. They can be integrated on the same chip, or made as separate chips housed in one package
Building the MEMS and signal-processing circuits on the same chip allows miniaturization and shorter wiring but complicates the process. Making separate chips, each with its optimal process, and housing them in one package is also widely used. The choice depends on the application and cost.