Lithography

What are the weak spots in a layout called, which lithography or process simulation predicts are prone to patterns bridging or breaking?

  1. AHotspots
  2. BNotch
  3. CDicing lanes
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Answer: A. Hotspots

Hotspots are locations in a layout where patterns tend to short or open as exposure dose and focus vary. They are found in advance through lithography simulation and pattern matching and dealt with by modifying the layout or adjusting OPC.

  • A. Correct. They are weak spots prone to failure.
  • B. A notch is a cut in the wafer edge.
  • C. Dicing lanes are the lines along which chips are cut apart.
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