Lithography

What is the wavelength of the mercury lamp's i-line?

  1. A365 nm
  2. B436 nm
  3. C193 nm
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Answer: A. 365 nm

Among mercury lamp lines, the g-line is 436 nm and the i-line is 365 nm. i-line exposure tools are still used for layers that do not need fine features and for manufacturing power devices, MEMS and more. 193 nm is the wavelength of the ArF excimer laser.

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