DRAM
Which pair of three-dimensional structures has been used in DRAM cells to secure capacitor capacitance?
- AFin and planar
- BTrench and stacked
- CFloating gate and charge trap
Show answer and explanation
Answer: B. Trench and stacked
To secure enough capacitance as cells shrink, DRAM capacitors have been made three-dimensional. There are trench capacitors, formed by etching deep holes into the substrate, and stacked capacitors, built as tall structures above the transistor; stacked capacitors are now mainstream. Floating gate and charge trap are flash memory structures.