Cleanrooms and equipment

When installing electron-beam lithography systems, electron microscopes and the like, which environmental factor needs special attention besides vibration?

  1. AOutside noise
  2. BMagnetic field fluctuations from nearby power cables, elevators and the like
  3. CThe color of the lighting
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Answer: B. Magnetic field fluctuations from nearby power cables, elevators and the like

Because an electron beam carries charge, even slight magnetic field fluctuations deflect it, causing placement errors in writing and blurred or jittering images. Such tools are therefore installed away from high-current cables, transformers and elevators, and magnetic shielding or active field cancellation systems are used.

  • A. Noise can also cause vibration, but it is not a factor specific to electron beams.
  • B. Correct. Magnetic field fluctuations deflect the electron beam.
  • C. Lighting color does not affect the electron beam.
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More Cleanrooms and equipment questions

  1. How is the cleanliness of a cleanroom generally expressed?
  2. What is the main reason yellow lighting is used in lithography areas?
  3. Which correctly describes a FOUP?
  4. What is the main purpose of the downflow method, in which air flows in one direction from ceiling to floor in a cleanroom?
  5. Which high-performance filters are used to remove fine particles from cleanroom air?