Cleanrooms and equipment

In precision facilities such as fabs, which metric grades allowable floor vibration levels as vibration velocity per frequency band?

  1. AISO 14644-1 class
  2. BGHS
  3. CVC (Vibration Criteria) curves
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Answer: C. VC (Vibration Criteria) curves

VC curves set allowable vibration for floors that hold precision tools as upper limits on vibration velocity per frequency band, graded in steps such as VC-A and VC-B. Later grades are stricter, and floors for exposure tools, electron microscopes and the like require strict levels. They are used in building design and in evaluating where tools are installed.

  • A. ISO classes measure air cleanliness.
  • B. GHS is a system for labeling chemical hazards.
  • C. Correct. It is a metric for allowable floor vibration.
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