Cleanrooms and equipment

What is the main reason yellow lighting is used in lithography areas?

  1. ATo prevent eye strain for workers
  2. BTo exclude the short-wavelength light to which photoresist is sensitive
  3. CTo prevent static electricity
Show answer and explanation

Answer: B. To exclude the short-wavelength light to which photoresist is sensitive

Photoresist reacts to short-wavelength light such as ultraviolet. Ordinary white lighting contains short wavelengths, so yellow lighting with them removed is used to prevent unintended exposure. Such areas are called yellow rooms.

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  1. Which correctly describes a FOUP?
  2. What is the main purpose of the downflow method, in which air flows in one direction from ceiling to floor in a cleanroom?
  3. Which high-performance filters are used to remove fine particles from cleanroom air?
  4. What is the approach called that keeps only the small space around wafers at high cleanliness?
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