Cleanrooms and equipment

What is the main purpose of the downflow method, in which air flows in one direction from ceiling to floor in a cleanroom?

  1. ATo quickly carry generated particles below the floor so they do not linger around wafers
  2. BTo raise the room temperature
  3. CTo lower noise in the room
Show answer and explanation

Answer: A. To quickly carry generated particles below the floor so they do not linger around wafers

When clean air filtered through high-performance ceiling filters flows in one direction toward the floor, particles generated by people and equipment are carried below the floor instead of being stirred up. This keeps particles from lingering around wafers.

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More Cleanrooms and equipment questions

  1. Which high-performance filters are used to remove fine particles from cleanroom air?
  2. What is the approach called that keeps only the small space around wafers at high cleanliness?
  3. What is the main reason the air pressure inside a cleanroom is kept higher than its surroundings (positive pressure)?
  4. Which is a major source of particles in cleanrooms, addressed by wearing cleanroom suits?
  5. Which term refers to gaseous contaminants (acids, bases, organics, etc.) rather than particles in a cleanroom?