Cleanrooms and equipment

Which high-performance filters are used to remove fine particles from cleanroom air?

  1. ALow-pass filters
  2. BColor filters
  3. CULPA filters (HEPA filters)
Show answer and explanation

Answer: C. ULPA filters (HEPA filters)

HEPA filters and the even higher-performance ULPA filters are air filters that trap fine airborne particles with fine fibers, installed in places such as cleanroom ceilings. A low-pass filter is an electrical circuit that removes high frequencies, and a color filter is a component that separates colors in image sensors and similar devices.

Practice this topic Back to topic

More Cleanrooms and equipment questions

  1. What is the approach called that keeps only the small space around wafers at high cleanliness?
  2. What is the main reason the air pressure inside a cleanroom is kept higher than its surroundings (positive pressure)?
  3. Which is a major source of particles in cleanrooms, addressed by wearing cleanroom suits?
  4. Which term refers to gaseous contaminants (acids, bases, organics, etc.) rather than particles in a cleanroom?
  5. In 300 mm wafer fabs, which system automatically transports FOUPs between tools along rails on the ceiling?