Cleanrooms and equipment

In a fab's automated material handling system, which automated storage holds FOUPs temporarily until their next process step?

  1. AStocker
  2. BEFEM
  3. CAir shower
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Answer: A. Stocker

A stocker is an automated warehouse with shelves where robots store and retrieve FOUPs, temporarily holding FOUPs that are waiting for tools to become free. It connects to transport systems such as OHT and dispatches the needed FOUPs on instructions from the manufacturing execution system.

  • A. Correct. It is an automated warehouse for temporarily storing FOUPs.
  • B. An EFEM is the module at the front of a tool that transfers wafers.
  • C. An air shower removes dust from clothing on entry.
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