Cleanrooms and equipment

In cleanroom air conditioning, which unit filters outside air and adjusts its temperature and humidity before supplying it to the recirculating room air?

  1. ALoad port
  2. BScrubber
  3. CMakeup air unit (MAU)
Show answer and explanation

Answer: C. Makeup air unit (MAU)

Cleanrooms take in outside air to keep positive pressure and replace exhausted air, but outside air varies greatly in temperature and humidity with the seasons and contains dirt. The usual division of labor is for the makeup air unit to pretreat it, while the recirculating air in the room is cleaned by FFUs and the like and finely temperature-controlled.

  • A. A load port is where a FOUP is placed and handed to the tool.
  • B. A scrubber cleans exhaust gas.
  • C. Correct. It pretreats outside air centrally.
Practice this topic Back to topic

More Cleanrooms and equipment questions

  1. In a fab's automated material handling system, which automated storage holds FOUPs temporarily until their next process step?
  2. In automated transport in a bay-type fab, which pair correctly names transport between bays and transport linking tools within a bay?
  3. Which cleanroom style places tools in a large room with few partitions, ensuring wafer cleanliness with sealed carriers such as FOUPs and mini-environments?
  4. In a high-cleanliness downflow cleanroom, which is closest to the typical number of times the room's air is replaced per hour (air changes per hour)?
  5. What is the main reason conductive (static-dissipative) materials are used for cleanroom floors and workbenches?