Cleanrooms and equipment

What is the main reason conductive (static-dissipative) materials are used for cleanroom floors and workbenches?

  1. ATo make the floor shine brightly
  2. BTo prevent devices from being destroyed by electrostatic discharge and particles from being attracted and stuck by static electricity
  3. CTo heat the floor by passing electricity through it
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Answer: B. To prevent devices from being destroyed by electrostatic discharge and particles from being attracted and stuck by static electricity

Cleanrooms contain many plastic containers and garments, so static charge builds up easily. Discharge (ESD) from charged objects or people can destroy devices, and charged wafers attract particles. Conductive floors and workbenches, grounded wrist straps and the like drain the charge away.

  • A. It is not for appearance.
  • B. Correct. It keeps static charge from building up.
  • C. It is not for floor heating.
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More Cleanrooms and equipment questions

  1. Which is the common definition of HEPA filter performance?
  2. In exposure areas using chemically amplified resists, why are basic molecular contaminants such as ammonia and amines controlled especially strictly?
  3. In fabs, what is the main reason the inner surfaces of stainless steel pipes that supply high-purity gases are electropolished (EP)?
  4. What is the role of the thick concrete floor with a grid of holes (waffle slab) used in fab cleanrooms?
  5. In precision facilities such as fabs, which metric grades allowable floor vibration levels as vibration velocity per frequency band?