Cleanrooms and equipment

In automated transport in a bay-type fab, which pair correctly names transport between bays and transport linking tools within a bay?

  1. AFront-end transport and back-end transport
  2. BInterbay transport and intrabay transport
  3. CWet transport and dry transport
Show answer and explanation

Answer: B. Interbay transport and intrabay transport

Bay-type fabs have combined interbay transport, which links distant bays via stockers and the like, with intrabay transport, which links tools to each other or to stockers within a bay. In recent 300 mm fabs, OHT handles both seamlessly, and direct tool-to-tool delivery is also widely used.

  • A. That is a different matter from front-end and back-end processes.
  • B. Correct. Between bays is interbay; within a bay is intrabay.
  • C. These are not common names for transport categories.
Practice this topic Back to topic

More Cleanrooms and equipment questions

  1. Which cleanroom style places tools in a large room with few partitions, ensuring wafer cleanliness with sealed carriers such as FOUPs and mini-environments?
  2. In a high-cleanliness downflow cleanroom, which is closest to the typical number of times the room's air is replaced per hour (air changes per hour)?
  3. What is the main reason conductive (static-dissipative) materials are used for cleanroom floors and workbenches?
  4. Which is the common definition of HEPA filter performance?
  5. In exposure areas using chemically amplified resists, why are basic molecular contaminants such as ammonia and amines controlled especially strictly?