Cleanrooms and equipment

Which correctly describes the typical approach to equipment layout in semiconductor fabs?

  1. AOnly arrangements like car factories, with tools lined up in process order, are used
  2. BA job-shop approach in which tools of the same type are grouped in bays (areas) connected by a transport system
  3. CEach tool is placed in a separate building
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Answer: B. A job-shop approach in which tools of the same type are grouped in bays (areas) connected by a transport system

Semiconductor manufacturing repeats deposition, lithography, etching and other steps dozens of times, so wafers visit the same type of tool many times. A job-shop layout, in which tools of the same type are grouped in bays connected by automated transport, is therefore typical.

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