Cleanrooms and equipment

Which device supplies ions to the air in a cleanroom to neutralize charge on wafers and equipment?

  1. AULPA filter
  2. BIonizer (static eliminator)
  3. CScrubber
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Answer: B. Ionizer (static eliminator)

Static electricity builds up easily in dry cleanrooms, and charged wafers attract particles or devices are damaged by electrostatic discharge. An ionizer supplies positive and negative ions to neutralize charge, preventing these problems.

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More Cleanrooms and equipment questions

  1. Which unit at the front of process equipment opens FOUP doors and transfers wafers into the equipment while keeping them in a clean environment?
  2. Which correctly describes the properties required of cleanroom suits?
  3. Which device, arrayed on the ceiling, integrates a filter and fan to deliver clean air?
  4. Which is one correct reason for not letting cleanroom humidity become extremely low?
  5. Which items are strictly restricted from being brought into a cleanroom?