Cleanrooms and equipment

Which is one correct reason for not letting cleanroom humidity become extremely low?

  1. ABecause mold grows more easily
  2. BBecause static electricity is generated more easily when humidity is too low
  3. CBecause lighting becomes dimmer
Show answer and explanation

Answer: B. Because static electricity is generated more easily when humidity is too low

If the air is too dry, static electricity is generated more easily, causing particles to stick to wafers and devices to be damaged by electrostatic discharge. On the other hand, too much humidity affects resist properties and corrosion, so cleanroom humidity is kept within a set range.

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More Cleanrooms and equipment questions

  1. Which items are strictly restricted from being brought into a cleanroom?
  2. Which correctly describes the typical approach to equipment layout in semiconductor fabs?
  3. What is the main purpose of replacing (purging) the inside of a FOUP with nitrogen?
  4. Which mini-environment method, widespread in the 200 mm era, carries cassettes in sealed pods and delivers them to equipment?
  5. In downflow cleanrooms, why are perforated floor panels (gratings) used?