Cleanrooms and equipment

What is the approach called that keeps only the small space around wafers at high cleanliness?

  1. ABallroom method
  2. BMini-environment method
  3. CDownflow stop method
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Answer: B. Mini-environment method

In the mini-environment approach, only spaces that wafers touch, such as FOUP and equipment interiors, are kept extremely clean, while cleanliness in spaces where people work is somewhat relaxed. Compared with the ballroom method, which makes the whole room ultra-clean, it reduces construction and operating costs.

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More Cleanrooms and equipment questions

  1. What is the main reason the air pressure inside a cleanroom is kept higher than its surroundings (positive pressure)?
  2. Which is a major source of particles in cleanrooms, addressed by wearing cleanroom suits?
  3. Which term refers to gaseous contaminants (acids, bases, organics, etc.) rather than particles in a cleanroom?
  4. In 300 mm wafer fabs, which system automatically transports FOUPs between tools along rails on the ceiling?
  5. Which facility at a cleanroom entrance blows strong jets of clean air at workers to remove dust from the surface of their clothing?