Silicon wafers

What is a used monitor wafer called after its surface films are removed and it is repolished for reuse?

  1. ASOI wafer
  2. BReclaimed wafer
  3. CEpitaxial wafer
Show answer and explanation

Answer: B. Reclaimed wafer

Monitor and dummy wafers are used in large quantities, so after use their surface films and contamination are removed by etching and polishing for reuse. These are called reclaimed wafers, and they save cost and resources.

Practice this topic Back to topic

More Silicon wafers questions

  1. Which method is used to measure wafer resistivity without contact?
  2. Which method irradiates FZ silicon with neutrons to convert some silicon into phosphorus, making it uniformly n-type?
  3. Which method applies a magnetic field to the crucible in the CZ method to suppress melt convection and control oxygen concentration and other properties?
  4. Which conditions are mainly adjusted during pulling to keep the diameter of a silicon single-crystal ingot constant?
  5. Which is one reason SiC wafers are difficult and expensive to manufacture?